A Comb-Drive Actuator Driven by Capacitively-Coupled-Power

Author: Chang Chao-Min   Wang Shao-Yu   Chen Rongshun   Yeh J. Andrew   Hou Max T.  

Publisher: MDPI

E-ISSN: 1424-8220|12|8|10881-10889

ISSN: 1424-8220

Source: Sensors, Vol.12, Iss.8, 2012-08, pp. : 10881-10889

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Abstract