Electrostatic Comb-Drive Actuator with High In-Plane Translational Velocity

Author： Eltagoury Yomna M.   Soliman Mostafa   Sabry Yasser M.   Alotaibi Mohammed J.   Khalil Diaa  

Publisher： MDPI

E-ISSN： 2072-666x|7|10|188-188

ISSN： 2072-666x

Source： Micromachines, Vol.7, Iss.10, 2016-10, pp. : 188-188

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