Instability of Contact Resistance in MEMS and NEMS DC Switches under Low Force: the Role of Alien Films on the Contact Surface

Author： Qiu Haodong   Wang Hong   Ke Feixiang  

Publisher： MDPI

E-ISSN： 1424-8220|13|12|16360-16371

ISSN： 1424-8220

Source： Sensors, Vol.13, Iss.12, 2013-11, pp. : 16360-16371

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