A Micromachined Pressure Sensor with Integrated Resonator Operating at Atmospheric Pressure

Author： Ren Sen Yuan Weizheng Qiao Dayong Deng Jinjun Sun Xiaodong

Publisher： MDPI

E-ISSN： 1424-8220|13|12|17006-17024

ISSN： 1424-8220

Source： Sensors, Vol.13, Iss.12, 2013-12, pp. : 17006-17024

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Abstract

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