Resistless Fabrication of Nanoimprint Lithography (NIL) Stamps Using Nano-Stencil Lithography

Author： Villanueva Luis Guillermo   Vazquez-Mena Oscar   Martin-Olmos Cristina   Savu Veronica   Sidler Katrin   Brugger Juergen  

Publisher： MDPI

E-ISSN： 2072-666x|4|4|370-377

ISSN： 2072-666x

Source： Micromachines, Vol.4, Iss.4, 2013-10, pp. : 370-377

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