Fabrication of Pneumatic Microvalve for Tall Microchannel Using Inclined Lithography

Author： Kaminaga Maho   Ishida Tadashi   Omata Toru  

Publisher： MDPI

E-ISSN： 2072-666x|7|12|224-224

ISSN： 2072-666x

Source： Micromachines, Vol.7, Iss.12, 2016-12, pp. : 224-224

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