UV-LIGA: From Development to Commercialization

Author: Genolet Grégoire   Lorenz Hubert  

Publisher: MDPI

E-ISSN: 2072-666x|5|3|486-495

ISSN: 2072-666x

Source: Micromachines, Vol.5, Iss.3, 2014-07, pp. : 486-495

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Abstract