SU-8 Photolithography as a Toolbox for Carbon MEMS

Author： Martinez-Duarte Rodrigo  

Publisher： MDPI

E-ISSN： 2072-666x|5|3|766-782

ISSN： 2072-666x

Source： Micromachines, Vol.5, Iss.3, 2014-09, pp. : 766-782

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