Innovative SU-8 Lithography Techniques and Their Applications

Author： Lee Jeong Bong   Choi Kyung-Hak   Yoo Koangki  

Publisher： MDPI

E-ISSN： 2072-666x|6|1|1-18

ISSN： 2072-666x

Source： Micromachines, Vol.6, Iss.1, 2014-12, pp. : 1-18

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