Design and Performance Analysis of Capacitive Micromachined Ultrasonic Transducer Linear Array

Author： Wang Hongliang Wang Xiangjun He Changde Xue Chenyang

Publisher： MDPI

E-ISSN： 2072-666x|5|3|420-431

ISSN： 2072-666x

Source： Micromachines, Vol.5, Iss.3, 2014-07, pp. : 420-431

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