Mechanically-Tunable Photonic Devices with On-Chip Integrated MEMS/NEMS Actuators

Author: Du Han   Chau Fook Siong   Zhou Guangya  

Publisher: MDPI

E-ISSN: 2072-666x|7|4|69-69

ISSN: 2072-666x

Source: Micromachines, Vol.7, Iss.4, 2016-04, pp. : 69-69

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Abstract