Devices Based on Co-Integrated MEMS Actuators and Optical Waveguide: A Review

Author： Chollet Franck  

Publisher： MDPI

E-ISSN： 2072-666x|7|2|18-18

ISSN： 2072-666x

Source： Micromachines, Vol.7, Iss.2, 2016-01, pp. : 18-18

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