The High Q Factor Lateral Field–Excited Thickness Shear Mode Film Bulk Acoustic Resonator Working in Liquid

Author： Chen Da   Ren Wenwen   Song Shuren   Wang Jingjing   Liu Weihui   Wang Peng  

Publisher： MDPI

E-ISSN： 2072-666x|7|12|231-231

ISSN： 2072-666x

Source： Micromachines, Vol.7, Iss.12, 2016-12, pp. : 231-231

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