Investigation on the Quality Factor Limit of the (111) Silicon Based Disk Resonator

Author： Zhou Xin Xiao Dingbang Li Qingsong Hu Qian Hou Zhanqiang He Kaixuan Chen Zhihua Zhao Chun Wu Yulie Wu Xuezhong Seshia Ashwin

Publisher： MDPI

E-ISSN： 2072-666x|9|1|25-25

ISSN： 2072-666x

Source： Micromachines, Vol.9, Iss.1, 2018-01, pp. : 25-25

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