Author: Morales Daniel Podolsky Igor Mailen Russell W. Shay Timothy Dickey Michael D. Velev Orlin D.
Publisher: MDPI
E-ISSN: 2072-666x|7|6|98-98
ISSN: 2072-666x
Source: Micromachines, Vol.7, Iss.6, 2016-05, pp. : 98-98
Disclaimer: Any content in publications that violate the sovereignty, the constitution or regulations of the PRC is not accepted or approved by CNPIEC.
Abstract
Related content
Electrothermal Actuators for SiO2 Photonic MEMS
By Peters Tjitte-Jelte Tichem Marcel
Micromachines, Vol. 7, Iss. 11, 2016-11 ,pp. :
Dynamic Electromechanical Coupling of Piezoelectric Bending Actuators
By Nabawy Mostafa R. A. Crowther William J.
Micromachines, Vol. 7, Iss. 1, 2016-01 ,pp. :
Mechanically-Tunable Photonic Devices with On-Chip Integrated MEMS/NEMS Actuators
By Du Han Chau Fook Siong Zhou Guangya
Micromachines, Vol. 7, Iss. 4, 2016-04 ,pp. :