An SOI CMOS-Based Multi-Sensor MEMS Chip for Fluidic Applications

Author: Mansoor Mohtashim   Haneef Ibraheem   Akhtar Suhail   Rafiq Muhammad Aftab   De Luca Andrea   Ali Syed Zeeshan   Udrea Florin  

Publisher: MDPI

E-ISSN: 1424-8220|16|11|1608-1608

ISSN: 1424-8220

Source: Sensors, Vol.16, Iss.11, 2016-11, pp. : 1608-1608

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Abstract