Optical-Interferometry-Based CMOS-MEMS Sensor Transduced by Stress-Induced Nanomechanical Deflection

Author： Maruyama Satoshi Hizawa Takeshi Takahashi Kazuhiro Sawada Kazuaki

Publisher： MDPI

E-ISSN： 1424-8220|18|1|138-138

ISSN： 1424-8220

Source： Sensors, Vol.18, Iss.1, 2018-01, pp. : 138-138

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