Mechatronic Development and Vision Feedback Control of a Nanorobotics Manipulation System inside SEM for Nanodevice Assembly

Author： Yang Zhan Wang Yaqiong Yang Bin Li Guanghui Chen Tao Nakajima Masahiro Sun Lining Fukuda Toshio

Publisher： MDPI

E-ISSN： 1424-8220|16|9|1479-1479

ISSN： 1424-8220

Source： Sensors, Vol.16, Iss.9, 2016-09, pp. : 1479-1479

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