Vibration Sensitivity Reduction of Micromachined Tuning Fork Gyroscopes through Stiffness Match Method with Negative Electrostatic Spring Effect

Author： Guan Yanwei   Gao Shiqiao   Liu Haipeng   Jin Lei   Zhang Yaping  

Publisher： MDPI

E-ISSN： 1424-8220|16|7|1146-1146

ISSN： 1424-8220

Source： Sensors, Vol.16, Iss.7, 2016-07, pp. : 1146-1146

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