A Multi-Fork Z-Axis Quartz Micromachined Gyroscope

Author： Feng Lihui   Zhao Ke   Sun Yunan   Cui Jianmin   Cui Fang   Yang Aiying  

Publisher： MDPI

E-ISSN： 1424-8220|13|9|12482-12496

ISSN： 1424-8220

Source： Sensors, Vol.13, Iss.9, 2013-09, pp. : 12482-12496

Access to resources Favorite

Disclaimer: Any content in publications that violate the sovereignty, the constitution or regulations of the PRC is not accepted or approved by CNPIEC.

Previous Menu Next

Abstract

Related content

A Z-Axis Quartz Cross-Fork Micromachined Gyroscope Based on Shear Stress Detection

By Xie Liqiang   Wu Xuezhong   Li Shengyi   Wang Haoxu   Su Jianbin   Dong Peitao  

Sensors, Vol. 10, Iss. 3, 2010-03 ,pp. : 1573-1588

MDPI

Access to resources Recommend Favorite

A Micro-Machined Gyroscope for Rotating Aircraft

By Yan Qingwen   Zhang Fuxue   Zhang Wei  

Sensors, Vol. 12, Iss. 7, 2012-07 ,pp. : 9823-9828

MDPI

Access to resources Recommend Favorite

A New Z-axis Resonant Micro-Accelerometer Based on Electrostatic Stiffness

By Yang Bo   Wang Xingjun   Dai Bo   Liu Xiaojun  

Sensors, Vol. 15, Iss. 1, 2015-01 ,pp. : 687-702

MDPI

Access to resources Recommend Favorite

Sensing Performance Analysis on Quartz Tuning Fork-Probe at the High Order Vibration Mode for Multi-Frequency Scanning Probe Microscopy

By Zhang Xiaofei   Gao Fengli   Li Xide  

Sensors, Vol. 18, Iss. 2, 2018-01 ,pp. : 336-336

MDPI

Access to resources Recommend Favorite

The Development of Micromachined Gyroscope Structure and Circuitry Technology

By Xia Dunzhu   Yu Cheng   Kong Lun  

Sensors, Vol. 14, Iss. 1, 2014-01 ,pp. : 1394-1473

MDPI

Access to resources Recommend Favorite