Digital Platform for Wafer-Level MEMS Testing and Characterization Using Electrical Response

Author： Brito Nuno Ferreira Carlos Alves Filipe Cabral Jorge Gaspar João Monteiro João Rocha Luís

Publisher： MDPI

E-ISSN： 1424-8220|16|9|1553-1553

ISSN： 1424-8220

Source： Sensors, Vol.16, Iss.9, 2016-09, pp. : 1553-1553

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