Atomic Layer Deposition TiO₂ Films and TiO₂/SiN_x Stacks Applied for Silicon Solar Cells

Author： Yang Zu-Po Cheng Hsyi-En Chang I-Hsuan Yu Ing-Song

Publisher： MDPI

E-ISSN： 2076-3417|6|8|233-233

ISSN： 2076-3417

Source： Applied Sciences, Vol.6, Iss.8, 2016-08, pp. : 233-233

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