Effect of Low Pressure on Surface Roughness and Morphological Defects of 4H-SiC Epitaxial Layers

Author： Hu Jichao   Jia Renxu   Xin Bin   Peng Bo   Wang Yuehu   Zhang Yuming  

Publisher： MDPI

E-ISSN： 1996-1944|9|9|743-743

ISSN： 1996-1944

Source： Materials, Vol.9, Iss.9, 2016-08, pp. : 743-743

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