Novel Capacitive Sensing System Design of a Microelectromechanical Systems Accelerometer for Gravity Measurement Applications

Author： Li Zhu Wu Wen Jie Zheng Pan Pan Liu Jin Quan Fan Ji Tu Liang Cheng

Publisher： MDPI

E-ISSN： 2072-666x|7|9|167-167

ISSN： 2072-666x

Source： Micromachines, Vol.7, Iss.9, 2016-09, pp. : 167-167

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