Fundamental Study for a Graphite-Based Microelectromechanical System

Author: Sone Junji   Murakami Mutsuaki   Tatami Atsushi  

Publisher: MDPI

E-ISSN: 2072-666x|9|2|64-64

ISSN: 2072-666x

Source: Micromachines, Vol.9, Iss.2, 2018-02, pp. : 64-64

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Abstract