Positron Annihilation in TaN Thin Sputtering Films Prepared with Various N₂ Partial Pressures

E-ISSN： 1662-9507|2017|373|237-240

ISSN： 1012-0386

Source： Defect and Diffusion Forum, Vol.2017, Iss.373, 2017-04, pp. : 237-240

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