Development of a 3D Tunneling Current Probing System for Micro- and Nano-Coordinate Metrology

Publisher: Trans Tech Publications

E-ISSN: 1662-7482|2017|870|126-131

ISSN: 1660-9336

Source: Applied Mechanics and Materials, Vol.2017, Iss.870, 2017-10, pp. : 126-131

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Abstract