Evolution of Optical and Structural Properties of Silicon Nanocrystals Embedded in Silicon Nitride Films with Annealing Temperature

Publisher: Trans Tech Publications

E-ISSN: 1661-9897|2017|49|163-173

ISSN: 1662-5250

Source: Journal of Nano Research, Vol.2017, Iss.49, 2017-10, pp. : 163-173

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Abstract