Investigation of Surface Morphology of 6H-SiC Irradiated with He+ and H2+ Ions

Author: Shen Qiang   Ran Guang   Zhou Wei   Ye Chao   Feng Qijie   Li Ning  

Publisher: MDPI

E-ISSN: 1996-1944|11|2|282-282

ISSN: 1996-1944

Source: Materials, Vol.11, Iss.2, 2018-02, pp. : 282-282

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Abstract