Effect of Growth Temperature on the Structural and Electrical Properties of ZrO2 Films Fabricated by Atomic Layer Deposition Using a CpZr[N(CH3)2]3/C7H8 Cocktail Precursor

Author： An Jong-Ki   Chung Nak-Kwan   Kim Jin-Tae   Hahm Sung-Ho   Lee Geunsu   Lee Sung Bo   Lee Taehoon   Park In-Sung   Yun Ju-Young  

Publisher： MDPI

E-ISSN： 1996-1944|11|3|386-386

ISSN： 1996-1944

Source： Materials, Vol.11, Iss.3, 2018-03, pp. : 386-386

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