Statistical Investigation of the Mechanical and Geometrical Properties of Polysilicon Films through On-Chip Tests

Author： Mirzazadeh Ramin   Ghisi Aldo   Mariani Stefano  

Publisher： MDPI

E-ISSN： 2072-666x|9|2|53-53

ISSN： 2072-666x

Source： Micromachines, Vol.9, Iss.2, 2018-01, pp. : 53-53

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