Method of Measuring the Mismatch of Parasitic Capacitance in MEMS Accelerometer Based on Regulating Electrostatic Stiffness

Author： Dong Xianshan   Yang Shaohua   Zhu Junhua   En Yunfei   Huang Qinwen  

Publisher： MDPI

E-ISSN： 2072-666x|9|3|128-128

ISSN： 2072-666x

Source： Micromachines, Vol.9, Iss.3, 2018-03, pp. : 128-128

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