Static and Dynamic Mechanical Behaviors of Electrostatic MEMS Resonator with Surface Processing Error

Author： Feng Jingjing   Liu Cheng   Zhang Wei   Hao Shuying  

Publisher： MDPI

E-ISSN： 2072-666x|9|1|34-34

ISSN： 2072-666x

Source： Micromachines, Vol.9, Iss.1, 2018-01, pp. : 34-34

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