On the Role of AlN Insertion Layer in Stress Control of GaN on 150-mm Si (111) Substrate

Author: Lin Po-Jung   Tien Ching-Ho   Wang Tzu-Yu   Chen Che-Lin   Ou Sin-Liang   Chung Bu-Chin   Wuu Dong-Sing  

Publisher: MDPI

E-ISSN: 2073-4352|7|5|134-134

ISSN: 2073-4352

Source: Crystals, Vol.7, Iss.5, 2017-05, pp. : 134-134

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