Effects of Al and N2 Flow Sequences on the Interface Formation of AlN on Sapphire by EVPE

Author: Kishimoto Katsuhiro   Funato Mitsuru   Kawakami Yoichi  

Publisher: MDPI

E-ISSN: 2073-4352|7|5|123-123

ISSN: 2073-4352

Source: Crystals, Vol.7, Iss.5, 2017-04, pp. : 123-123

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