Chemical-Mechanical Impact of Nanoparticles and pH Effect of the Slurry on the CMP of the Selective Layer Surfaces

Author： Ilie Filip   Ipate George  

Publisher： MDPI

E-ISSN： 2075-4442|5|2|15-15

ISSN： 2075-4442

Source： Lubricants, Vol.5, Iss.2, 2017-05, pp. : 15-15

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