Impacts of the Oxygen Precursor on the Interfacial Properties of LaxAlyO Films Grown by Atomic Layer Deposition on Ge

Author： Zhao Lu   Liu Hongxia   Wang Xing   Wang Yongte   Wang Shulong  

Publisher： MDPI

E-ISSN： 1996-1944|10|8|856-856

ISSN： 1996-1944

Source： Materials, Vol.10, Iss.8, 2017-07, pp. : 856-856

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