Optimization of Wet Strip for Metal Void Reduction in Trench First Metal Hard Mask Back End of Line Process

Publisher: Trans Tech Publications

E-ISSN: 1662-9779|2018|282|250-255

ISSN: 1012-0394

Source: Solid State Phenomena, Vol.2018, Iss.282, 2018-10, pp. : 250-255

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Abstract