Study of the Anisotropic Wet Etching of Nanoscale Structures in Alkaline Solutions

Publisher: Trans Tech Publications

E-ISSN: 1662-9779|2018|282|88-93

ISSN: 1012-0394

Source: Solid State Phenomena, Vol.2018, Iss.282, 2018-10, pp. : 88-93

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Abstract