Oxidation Behavior of Cr_1-xAl_xN Coatings Deposited by Closed Field Unbalanced Magnetron Sputtering at 800°C

E-ISSN： 1662-9779|2018|281|546-551

ISSN： 1012-0394

Source： Solid State Phenomena, Vol.2018, Iss.281, 2018-10, pp. : 546-551

Disclaimer: Any content in publications that violate the sovereignty, the constitution or regulations of the PRC is not accepted or approved by CNPIEC.

Previous Menu Next

Abstract

Related content

Promising Materials of Nonvolatile Memory Based on HfOх and Achievement of Device Parameters in the TiN/Hf_0.5Zr_0.5O₂/ TiN/SiO₂/Si and TiN/Hf_XAl_1-XO_Y/Pt/SiO₂/Si Test Structures Obtained on the National Technological Basis

Defect and Diffusion Forum, Vol. 2018, Iss. 386, 2018-11 ,pp. : 172-177

Trans Tech Publications

Access to resources Recommend Favorite

Structure and Stability of Intermediate (Fe, Cr)₇C₃ Carbides

Solid State Phenomena, Vol. 2018, Iss. 284, 2018-11 ,pp. : 634-639

Trans Tech Publications

Access to resources Recommend Favorite

Thermal Expansion of Ca_1-xSr_xZr₄(PO₄)₆ Ceramics

Solid State Phenomena, Vol. 2018, Iss. 281, 2018-10 ,pp. : 389-394

Trans Tech Publications

Access to resources Recommend Favorite

Joining SiC Ceramics with Ti₃SiC₂/Ti_xC_y Multi-Interlayer by Spark Plasma Sintering

Solid State Phenomena, Vol. 2018, Iss. 281, 2018-10 ,pp. : 343-348

Trans Tech Publications

Access to resources Recommend Favorite

Thermal Shock Resistance of Yb₂SiO₅/Si and Yb₂Si₂O₇/Si Coatings Deposited on C/SiC Composites

Solid State Phenomena, Vol. 2018, Iss. 281, 2018-10 ,pp. : 472-477

Trans Tech Publications

Access to resources Recommend Favorite