Is Highly Selective Si₃N₄/SiO₂ Etching Feasible without Phosphoric Acid?

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Solid State Phenomena, Vol. 2018, Iss. 282, 2018-10 ,pp. : 147-151

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Promising Materials of Nonvolatile Memory Based on HfOх and Achievement of Device Parameters in the TiN/Hf_0.5Zr_0.5O₂/ TiN/SiO₂/Si and TiN/Hf_XAl_1-XO_Y/Pt/SiO₂/Si Test Structures Obtained on the National Technological Basis

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Defect and Diffusion Forum, Vol. 2018, Iss. 386, 2018-11 ,pp. : 172-177

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Thermal Expansion of Ca_1-xSr_xZr₄(PO₄)₆ Ceramics

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Solid State Phenomena, Vol. 2018, Iss. 281, 2018-10 ,pp. : 389-394

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Preparation and Properties of Si₃N₄-BaTiO₃ Composite Ceramics

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Solid State Phenomena, Vol. 2018, Iss. 281, 2018-10 ,pp. : 646-651

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Joining SiC Ceramics with Ti₃SiC₂/Ti_xC_y Multi-Interlayer by Spark Plasma Sintering

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Solid State Phenomena, Vol. 2018, Iss. 281, 2018-10 ,pp. : 343-348

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