A Multiple Resonant Mode Film Bulk Acoustic Resonator Based on Silicon-on-Insulator Structures

Publisher： IOP Publishing

E-ISSN： 1741-3540|31|12|124302-124305

ISSN： 0256-307X

Source： Chinese Physics Letters, Vol.31, Iss.12, 2014-12, pp. : 124302-124305

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