Mass spectrometric study of ammonia/methane surface-wave plasma applied to low-temperature growth of carbon nanomaterials

Publisher: IOP Publishing

E-ISSN: 1361-6463|48|4|45201-45210

ISSN: 0022-3727

Source: Journal of Physics D: Applied Physics, Vol.48, Iss.4, 2015-02, pp. : 45201-45210

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Abstract