Spatially resolved Langmuir probe diagnostics in a capacitively coupled radio frequency argon and oxygen plasma

E-ISSN： 1361-6595|24|1|15027-15036

ISSN： 0963-0252

Source： Plasma Sources Science and Technology, Vol.24, Iss.1, 2015-02, pp. : 15027-15036

Disclaimer: Any content in publications that violate the sovereignty, the constitution or regulations of the PRC is not accepted or approved by CNPIEC.

Previous Menu Next

Abstract

Related content

A dc-pulsed capacitively coupled planar Langmuir probe for plasma process diagnostics and monitoring

By Šamara V. Booth J-P de Marneffe J-F Milenin A.P. Brouri M. Boullart W.

Plasma Sources Science and Technology, Vol. 21, Iss. 6, 2012-12 ,pp. : 65004-65011

IOP Publishing

Access to resources Recommend Favorite

Influence of surface conditions on plasma dynamics and electron heating in a radio-frequency driven capacitively coupled oxygen plasma

Plasma Sources Science and Technology, Vol. 24, Iss. 4, 2015-01 ,pp. : 44003-44016

IOP Publishing

Access to resources Recommend Favorite

FINITE THICKNESS EFFECT OF PROBE SHEATH IN RADIO-FREQUENCY PLASMA PROBE DIAGNOSTICS

Le Journal de Physique Colloques, Vol. 40, Iss. C7, 1979-07 ,pp. : C7-807-C7-808

Edp Sciences

Access to resources Recommend Favorite

Electron dynamics and frequency coupling in a radio-frequency capacitively biased planar coil inductively coupled plasma system

Plasma Sources Science and Technology, Vol. 24, Iss. 4, 2015-01 ,pp. : 44007-44014

IOP Publishing

Access to resources Recommend Favorite