Author: Lee Huijea Yi Changho Park Seungil Cho Moohyun Namkung Won Lee Huijea Lee Huijea
Publisher: IOP Publishing
E-ISSN: 1361-6595|24|1|15031-15036
ISSN: 0963-0252
Source: Plasma Sources Science and Technology, Vol.24, Iss.1, 2015-02, pp. : 15031-15036
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Abstract
An electron cyclotron resonance plasma source with a belt-type magnet assembly and slit antennas was developed for generating high density plasmas at low operating pressures. To enhance plasma confinement and avoid the disadvantages of quartz windows, a continuous arrangement of magnets and direct microwave injection from the slit antennas without quartz windows was used. This plasma source operated at an argon gas pressure of 0.4–1 mTorr and microwave power of 300–800 W. Electron temperature and ion density are dependent on the radial and axial position.
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