Improved size distribution control of silicon nanocrystals in a spatially confined remote plasma

Author: Doğan İlker   Westerman René H J   Doğan İlker  

Publisher: IOP Publishing

E-ISSN: 1361-6595|24|1|15030-15040

ISSN: 0963-0252

Source: Plasma Sources Science and Technology, Vol.24, Iss.1, 2015-02, pp. : 15030-15040

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Abstract