Resist Materials for Extreme Ultraviolet Lithography: Toward Low‐Cost Single‐Digit‐Nanometer Patterning

Publisher: John Wiley & Sons Inc

E-ISSN: 1521-4095|27|38|5813-5819

ISSN: 0935-9648

Source: ADVANCED MATERIALS, Vol.27, Iss.38, 2015-10, pp. : 5813-5819

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Abstract