Low specific contact resistance on epitaxial p-type 4H-SiC with a step-bunching surface

Publisher： IOP Publishing

E-ISSN： 1741-4199|24|11|117304-117311

ISSN： 1674-1056

Source： Chinese Physics B, Vol.24, Iss.11, 2015-11, pp. : 117304-117311

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Abstract

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