Aerosol based direct-write micro-additive fabrication method for sub-mm 3D metal-dielectric structures

Author: Rahman Taibur   Renaud Luke   Heo Deuk   Renn Michael   Panat Rahul  

Publisher: IOP Publishing

E-ISSN: 1361-6439|25|10|107002-107009

ISSN: 0960-1317

Source: Journal of Micromechanics and Microengineering, Vol.25, Iss.10, 2015-10, pp. : 107002-107009

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