Structural properties and metallic conductivity of Ti1−xNbxO2 films grown by atomic layer deposition on crystalline substrates

Publisher: IOP Publishing

E-ISSN: 1361-6463|48|49|495305-495311

ISSN: 0022-3727

Source: Journal of Physics D: Applied Physics, Vol.48, Iss.49, 2015-12, pp. : 495305-495311

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Abstract